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The Master-S100 EDI Ultrapure Water System is an essential auxiliary water purification equipment for university IC (Integrated Circuit) fabrication teaching lines — it produces 18.2MΩ·cm ultrapure water for wafer cleaning, developing, and other wet processes, with EDI technology, multi-stage filtration, and stable performance, tailored for academic teaching, lab training, and microelectronics course experiments.
Specification Item | Details |
Model Number | Master-S100 EDI Ultrapure Water System |
Application | Production of ultrapure water for IC fabrication wet processes (wafer cleaning, developing) in university teaching labs |
Water Production Capacity | 100L/H |
Resistivity (25℃) | 18.2MΩ·cm |
Heavy Metal Ions | <0.01 ppb |
Total Organic Carbon (TOC) | <10 ppb (UV/UF model: <3 ppb) |
Bacteria | <0.01 cfu/ml |
Endotoxin | <0.001 Eu/ml (UF/UV model) |
Particles (0.2μm) | <1/ml |
RNases | <1pg/ml (UF/UV model) |
DNases | <5pg/ml (UF/UV model) |
Purification Process | RO reverse osmosis + EDI electrodeionization |
Ion Rejection Rate | ≥98-99% |
Organic Rejection Rate (MW>200) | >99% |
Particle & Bacteria Rejection Rate | >99% |
Feed Water Requirements | Municipal tap water (5-35℃, 1.0-4.0 bar) |
Power Supply | AC100-240V, 50/60Hz, 220W |
Equipment Dimensions (L×W×H) | 500mm × 360mm × 540mm |
Product Weight | ~24KG |
1. Semiconductor-Grade Water Quality
Delivers 18.2MΩ·cm ultrapure water, meeting the strict requirements of IC fabrication and allowing students to work with industrial-standard water quality in teaching experiments.
2. Reliable & Low Maintenance
The EDI purification technology eliminates the need for frequent resin regeneration, reducing lab maintenance and ensuring consistent water quality over time.
3. Scalable & Efficient
100L/H capacity supports continuous lab operations, while the compact design fits easily into university lab spaces.
4. Student-Friendly Operation
Intuitive control interface and automatic monitoring make it easy for students to operate, with built-in protection against low/high water pressure and system faults.
Package: 1 set of Master-S100 EDI Ultrapure Water System (including RO membrane, EDI module, UV/UF sterilization unit, and control system)
Service: On-site installation + water quality calibration + operation training (for teachers/students) + 1-year warranty
