UV-Ozone Wafer Cleaner for University IC Teaching Wafer Fabrication Training Line

Product Overview

The SC-UV-I UV-Ozone Wafer Cleaner is a critical surface treatment equipment for university IC (Integrated Circuit) fabrication teaching lines — it removes photoresist and organic contaminants from wafers using UV-ozone oxidation, with dual-wavelength UV sources, precise timing/temperature control, and a compact, portable design, tailored for academic teaching, lab training, and microelectronics course experiments.

Key Specifications

• Specification Item	Details
  Model Number	SC-UV-I
  Application	Post-process UV-ozone cleaning of wafers (removal of photoresist/organic contaminants) in university IC fabrication teaching line
  UV Wavelengths	185nm + 254nm
  UV Irradiation Intensity	32mW/cm²
  Lamp Power	150W
  Irradiation Area	150mm × 200mm
  Timer Range	0~99min99s (with automatic countdown)
  Temperature Control Range	Room temperature ~ 200℃
  Equipment Dimensions (W×D×H)	250mm × 300mm × 260mm
  Wafer Stage Dimensions (W×D×H)	160mm × 200mm × 5~30mm
  Product Weight	8KG
  Operating Ambient Temperature	0-40℃
  Power Input	110V/220V, 200W

Advantages for University IC Labs

1. Teaching Process Coverage

Supports UV-ozone cleaning, a key step in IC fabrication for removing organic residues, allowing students to learn dry-cleaning principles and their role in semiconductor manufacturing.

2. Efficient & Effective Cleaning

Dual-wavelength UV lamps generate high-concentration ozone, ensuring rapid, damage-free removal of contaminants, which is essential for consistent experimental results in teaching labs.

3. Student-Friendly Operation

Intuitive timer and temperature controls, plus a lightweight, portable design, make it easy for students to set up and operate, even in group lab sessions.

4. Compact & Safe

Small footprint fits on lab benches; low power consumption and enclosed design meet university lab safety standards for UV equipment.

Package & Service

• Package: 1 set of SC-UV-I UV-Ozone Wafer Cleaner (including UV lamp module, control panel, and wafer stage)

• Service: On-site installation (integrated into teaching production line) + operation training (for teachers/students) + 1-year warranty