The JFH-100 Cleanroom Wafer Dryer is a dedicated drying equipment for university IC (Integrated Circuit) fabrication teaching lines — it performs precision drying of wafers after wet processing, with cleanroom-grade construction, precise temperature control, and user-friendly timing, tailored for academic teaching, lab training, and microelectronics course experiments.
Specification Item | Details |
Model Number | JFH-100 |
Application | Drying of wafers after wet processes (cleaning/etching/developing) in university IC fabrication teaching line |
Temperature Range | Room temperature ~ 200℃ (adjustable) |
Temperature Control Accuracy | ±1℃ |
Timer Setting | 0~999 minutes (adjustable) |
Drying Chamber Dimensions | 350mm × 350mm × 350mm |
Heating Power | 3000W |
Blower Power | 180W |
Power Input | AC220V/50Hz |
Machine Dimensions (L×W×H) | 880mm × 580mm × 970mm |
Machine Weight | 110KG |
1. Teaching Process Alignment
Designed for post-wet-process wafer drying, it bridges the gap between cleaning and subsequent steps in IC fabrication, helping students understand full-process wafer handling.
2. Precision & Efficiency
±1℃ temperature accuracy and forced-air circulation ensure uniform, damage-free drying of wafers, critical for consistent experimental results in teaching labs.
3. Cleanroom-Grade Reliability
The cleanroom-compatible design prevents contamination of wafers, meeting the strict cleanliness requirements of IC fabrication teaching.
4. Student-Friendly Operation
Intuitive timer and temperature controls, plus a compact footprint, make it easy for students to operate and integrate into lab workflows.
Package: 1 set of JFH-100 Cleanroom Wafer Dryer (including drying chamber, heating module, blower, and control system)
Service: On-site installation (integrated into teaching production line) + operation training (for teachers/students) + 1-year warranty