Multi-Tank Wet Wafer Cleaner for Teaching & Research Dual-Purpose Total Solution Wafer Production Line

Product Overview

The JQ-100 Multi-Tank Wet Wafer Cleaner is a dedicated post-development cleaning equipment for university IC (Integrated Circuit) fabrication teaching lines — it integrates three independent cleaning tanks (organic, DI, organic) with ultrasonic cleaning, corrosion-resistant materials, and full safety protection, tailored for academic teaching, lab training, and microelectronics course experiments.

Key Specifications

• Specification Item	Details
  Model Number	JQ-100
  Application	Multi-step wet cleaning for post-development wafers (university IC fabrication teaching line)
  Functional Tanks	3 dedicated tanks (2×organic cleaning + 1×DI cleaning)
  Tank Material	Stainless steel (corrosion-resistant)
  Tank Functionality	Soaking, manual liquid preparation, waste liquid recovery, wastewater discharge, ultrasonic cleaning
  Gas/Water Configuration	1 air gun + 1 water gun + 1 DI water tap
  Tank Size	200mm × 200mm × 200mm
  Waste Liquid Recovery	1 unit (with automatic liquid level monitoring)
  Safety Protection	2 pairs of imported anti-corrosion gloves; top exhaust port (φ200mm, manual pressure valve)
  Power Input	AC380V, 2KW
  Machine Dimensions (L×W×H)	1500mm × 1100mm × 2000mm
  Machine Weight	280KG

Advantages for University IC Labs

1. Complete Cleaning Process CoverageThree tanks with independent ultrasonic cleaning support the full wet cleaning workflow of IC fabrication, allowing students to learn multi-step wafer cleaning principles and operations.

2. Corrosion-Resistant & DurableStainless steel tank materials resist organic solvents and DI water, ensuring long-term use in lab environments with frequent reagent changes.

3. Safe & User-Friendly

• Anti-corrosion gloves and automatic liquid level monitoring prevent chemical exposure and overflow risks.

• Exhaust system removes volatile fumes, complying with university lab safety standards.

• Integrated gas/water tools enable flexible process adjustment for teaching experiments.

4. Space-Efficient Lab DesignCompact footprint fits university lab workbenches, while built-in storage cabinets provide space for reagent tools and student supplies.

Package & Service

• Package: 1 set of JQ-100 Multi-Tank Wet Wafer Cleaner (including 3 functional tanks, ultrasonic modules, gas/water accessories, and safety equipment)

• Service: On-site installation (integrated into teaching production line) + operation training (for teachers/students) + 1-year warranty