JS-100 Wet Etching Machine for University IC Production Training Line

Product Introduction

The JS-100 Wet Etching Machine is a core multi-process equipment for university IC (Integrated Circuit) fabrication teaching lines — it integrates developing, cleaning, and etching functions in one unit, designed to handle post-exposure wafer processing. With dedicated functional tanks, corrosion-resistant materials, and full safety protection, it perfectly meets the needs of academic teaching, lab training, and small-batch prototyping for microelectronics majors.

Key Functions & Process Coverage

This machine covers 3 critical wet processes in IC wafer fabrication:

1. Developing Process (EPD Tank)

• Soak wafers to complete photoresist development; supports manual liquid preparation, waste liquid recovery, and discharge.

• Tank material: PVDF (resistant to organic solvents in developing reagents).

2. Cleaning Process (Cleaning Tank)

• Rinse wafers with pure water after developing/etching; equipped with a pure water tap and waste water discharge system.

• Tank material: PP (corrosion-resistant & easy to clean).

3. Etching Process (Acid Tank)

• Soak wafers for material etching; supports immersion heating (30-150℃ temperature control) and waste liquid recovery.

• Tank material: PTFE (resistant to strong acids/bases in etching reagents).

Product Advantages (For University Labs)

1. Teaching Line Compatibility

Integrates 3 core wet processes in one machine, matching the complete wet process section of 1μm IC teaching wafer lines — ideal for students to learn full-process wafer fabrication.

2. Corrosion-Resistant & Durable

Tanks adopt PVDF/PP/PTFE materials (targeted for different reagents), ensuring long-term use in lab environments with various chemical liquids.

3.Full Safety Protection

• 4 pairs of imported anti-corrosion gloves (isolate operators from reagents).

• Automatic liquid level monitoring (prevents overflow).

• Top exhaust port (φ200mm) with pressure valve (removes volatile fumes, complying with lab safety standards).

  4. User-Friendly for Teaching

• Manual liquid preparation & operation (fits student hands-on training).

• Dedicated gas/water configuration (1 air gun + 1 water gun + 1 DI tap) for flexible process adjustment.

Technical Parameters

Service & Support

• Installation: On-site installation & integration into your university’s IC teaching production line.

• Training: Free operation training for teachers & students (covers process setup, safety operation, and maintenance).

• Warranty: 1-year warranty + lifetime technical support.