Magnetron Sputtering System for University IC Fabrication Training Line

Product Overview

The JC-100 Magnetron Sputtering System is a key metallization equipment for university IC (Integrated Circuit) fabrication teaching lines — it deposits metal films on wafers via high-vacuum magnetron sputtering, with dual-target configuration, precise process control, and user-friendly design, tailored for academic teaching, lab training, and microelectronics course experiments.

Key Specifications

• Specification Item	Details
  Model Number	JC-100
  Application	Wafer metallization (metal film deposition) for university IC fabrication teaching line
  Applicable Wafer Size	6" (φ150mm)
  Vacuum Chamber	φ500×H420mm, SUS304 stainless steel
  Vacuum System	Compound molecular pump + direct-coupled high-vacuum pump + high-vacuum valve + digital vacuum gauge
  Ultimate Vacuum	6.0×10⁻⁵Pa (after 24h idle pump-down)
  Vacuum Pumping Speed	From atmosphere to 5.0×10⁻³Pa in ≤15min (idle)
  Sputtering Targets	2 sets of 3" permanent magnet confocal sputtering targets (angle & position adjustable)
  Wafer Stage Rotation Speed	0-20 rpm (adjustable)
  Power Supply Configuration	2×1kW DC pulse sputtering power supplies + 1×-1kV bias power supply
  Film Thickness Uniformity	≤±5%
  Control System	PLC + touch screen
  Power Input	AC380V 50Hz (three-phase five-wire), total power ≤10kW
  Machine Dimensions (L×W×H)	1356mm × 1100mm × 1852mm
  Machine Weight	650KG

Advantages for University IC Labs

1. Teaching Process CoverageSupports wafer metallization (a core step in IC fabrication), allowing students to learn physical vapor deposition (PVD) principles and operation in microelectronics courses.

2. Dual-Target Flexible ExperimentationTwo independent sputtering targets enable deposition of single/stacked metal films, supporting diverse teaching scenarios and student project needs.

3. High-Precision & Stable Performance

• Ultra-high vacuum environment ensures film purity; ±5% uniformity guarantees consistent experimental results.

• PLC + touch screen control simplifies operation, lowering the learning curve for students.

4. Safety & ReliabilityEquipped with pneumatic baffle structure and interlock protection, meeting university lab safety standards for high-vacuum equipment.

Package & Service

• Package: 1 set of JC-100 Magnetron Sputtering System (including vacuum chamber, dual sputtering targets, power supplies, and control system)

• Service: On-site installation (integrated into teaching production line) + operation training (for teachers/students) + 1-year warranty