JT-100 Wafer Oxidation Annealing Furnace for PMOS Target Chip Wafer Processing Training System

Product Overview

The JT-100 Oxidation & Annealing Furnace is a critical thermal processing equipment for university IC (Integrated Circuit) fabrication teaching lines — it performs oxidation and annealing operations on wafers, with high-precision temperature control, dual-quartz-boat configuration, and safe protection features, tailored for academic teaching, lab training, and microelectronics course experiments.

Key Specifications

Specification Item	Details
Model Number	JT-100
Application	Oxidation & annealing processing for wafers (university IC fabrication teaching line)
Applicable Wafer Size	4" (fits standard teaching wafer specifications)
Working Temperature	400-1260℃
Temperature Uniformity	±1℃ (within 200mm constant temperature zone)
Quartz Tube Configuration	1 tube (φ150×1000mm) + 2 quartz boats
Temperature Control Component	Thyristor power module (stable & precise)
Safety Protection	Independent over-temperature protection (per tube)
Temperature Ramp Rate	Heating: 10-50℃/min; Cooling: 0-3.5℃/min (for 900-1300℃)
Gas Control Mode	Mass flowmeter automatic control
Power Input	380V±10% 50Hz (three-phase five-wire); Max Power: ≤20KVA
Machine Dimensions (L×W×H)	1500mm × 650mm × 1600mm
Machine Weight	750KG

Advantages for University IC Labs

1. Dual-Process Teaching CoverageIntegrates oxidation and annealing (two core thermal processes in IC fabrication), allowing students to learn consecutive wafer processing steps in one equipment

2. High-Precision for Teaching Experiments±1℃ temperature uniformity ensures consistent process results, which is essential for demonstrating thermal process principles in microelectronics courses

3. Safe & Efficient for Lab Teaching

Independent over-temperature protection reduces safety risks in student-operated environments
2 quartz boats support simultaneous processing of multiple samples, improving lab teaching efficiency

4. Industrial-Grade Operation ExperienceAdopts thyristor power modules & mass flowmeters (consistent with industrial equipment), helping students master professional thermal processing machine operations

Package & Service

Package: 1 set of JT-100 Oxidation & Annealing Furnace (including quartz tube, 2 quartz boats, and control system)
Service: On-site installation (integrated into teaching production line) + operation training (for teachers/students) + 1-year warranty

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