JK-100 Dual-Tube Phosphorus Diffusion Furnace for University IC Fabrication Teaching Line

Product Overview

The JK-100 Dual-Tube Phosphorus Diffusion Furnace is a key thermal processing equipment for university IC (Integrated Circuit) fabrication teaching lines — it performs phosphorus diffusion on wafers, with dual-tube design, high-precision temperature control, and safe operation features, perfectly fitting academic teaching, lab training, and small-batch prototyping for microelectronics majors.

Key Specifications

• Specification Item	Details
  Model Number	JK-100
  Application	Phosphorus diffusion for wafers (university IC fabrication teaching line)
  Applicable Wafer Size	4" (meets standard teaching wafer specifications)
  Working Temperature	400-1260℃
  Temperature Uniformity	±1℃ (within 200mm constant temperature zone)
  Quartz Tube Configuration	2 tubes (φ150×1000mm) + 2 quartz boats
  Temperature Control Component	Thyristor power module (precise & stable control)
  Safety Protection	Independent over-temperature protection for each tube
  Temperature Ramp Rate	Heating: 10-50℃/min; Cooling: 0-3.5℃/min (for 900-1300℃)
  Gas Control Mode	Mass flowmeter automatic control
  Power Input	380V±10% 50Hz (three-phase five-wire); Max Power: ≤20KVA
  Machine Dimensions (L×W×H)	1500mm × 650mm × 1600mm
  Machine Weight	750KG

Advantages for University IC Labs

1. Teaching Process MatchSupports 4" wafer phosphorus diffusion (a core step in IC fabrication), perfectly aligning with university microelectronics course content (e.g., semiconductor material processing)

2. Dual-Tube Efficient Teaching2 independent tubes + quartz boats enable simultaneous processing of multiple samples, improving lab teaching efficiency (suitable for group experiments)

3. High-Precision & Safe Operation

• ±1℃ temperature uniformity ensures consistent diffusion results (critical for teaching experiment repeatability)

• Independent over-temperature protection + stable temperature ramp/cooling control reduce lab safety risks

4. Industrial-Grade Performance (Teaching-Oriented)Adopts thyristor power module & mass flowmeter (same as industrial diffusion furnaces), helping students master professional equipment operation

Package & Service

• Package: 1 set of JK-100 Dual-Tube Phosphorus Diffusion Furnace (including 2 quartz tubes, 2 quartz boats, and control system)

• Service: On-site installation (integrated into teaching production line) + operation training (for teachers/students) + 1-year warranty